The average annual salary for tech workers in Silicon Valley surpassed $100,000 for the first time in 2011, according to a report Monday by online jobs site Dice Holdings Inc.

Dice Senior Vice President Tom Silver told the Wall Street Journal that the average is up 5.2 percent from 2010's average and much higher than the 2 percent pay raise that tech workers elsewhere in the U.S. got last year, which averaged $81,327.

Dice began its annual survey of tech salaries in 2001.

In addition to the data on annual pay, Dice said bonuses for Silicon Valley tech workers rose by 13 percent last year to $12,450. The average bonus increase nationwide was 8 percent to $8,769.

It also reported that hourly contractor rates in Silicon Valley rose 11 percent to $74 an hour, while it rose by only 2 percent to $63 an hour across the country.

A recently Fortune survey put the average pay for Microsot software engineers at $118,000, with a $13,800 bonues.

A survey last summer put mid-career median pay at Amazon at $110,000 a year, and $127,000 at Microsoft.